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DataRay»çÀÇ BeamMap Quality Measuring Device BMH4XY60-SI´Â ·¹ÀÌÀú ºöÀÇ Ç°Áú($\text{M}^2$) ¹× ºö ¸Å°³º¯¼ö¸¦ ½Ç½Ã°£À¸·Î ÃøÁ¤ÇÏ´Â µ¥ »ç¿ëµÇ´Â ½ºÄ³´× ½½¸´(Scanning Slit) ¹æ½ÄÀÇ ºö ÇÁ·ÎÆÄÀÏ·¯(Beam Profiler)ÀÔ´Ï´Ù.
ÃøÁ¤ ¹æ½Ä : ½ºÄ³´× ½½¸´ (Scanning Slit, True2D Slits)
ÃøÁ¤ ±â´É : ½Ç½Ã°£ M^2, ºö ¹ß»ê, Æ÷ÀÎÆÃ, ÃÊÁ¡ À§Ä¡ ¹× Å©±â ÃøÁ¤
°ËÃâ±â À¯Çü : Si (Silicon)
ÆÄÀå ¹üÀ§ : 190 nm ~ 1150 nm (ÀϹÝÀûÀÎ Si °ËÃâ±â ±âÁØ)
½ºÄµ ºö Á÷°æ : 5 µm ~ 4 mm (Si °ËÃâ±â ±âÁØ)
½½¸´ Æò¸é ¼ö : $\text{4}$°³ (¸ðµ¨¸í H4 ±â¹Ý)
Æò¸é °£°Ý ($\text{Z}$Ãà) : 50, 100, 250, 500, 750 µm Áß¿¡¼ ¼±Åà °¡´É
ºÐÇØ´É Á¤È®µµ : 0.1 µm ¶Ç´Â ½ºÄµ ¹üÀ§ÀÇ 0.05%
M^2 ÃøÁ¤ ¹üÀ§ : 1 ~ > 20 (+-5%)
ÃøÁ¤ °¡´ÉÇÑ ±¤¿ø : CW (¿¬¼ÓÆÄ), Quasi-CW ºö
ÃÖ´ë Çã¿ë ÆÄ¿ö : 1 W (ÃÑ ÆÄ¿ö) & 0.5 mW/µm}^2 (Irradiance)
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